Zobrazeno 1 - 10
of 47
pro vyhledávání: '"George D Skidmore"'
Autor:
Victor M. Bright, John P. Houlton, Omkar D. Supekar, Charles T. Rogers, Steven M. George, Jonas C. Gertsch, Emanuele Sortino, George D. Skidmore
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
This paper presents the first study of the effect of thermal atomic layer etching (ALE) on the residual stress in suspended atomic layer deposition (ALD) structures. Optical curvature measurements on silicon wafers with varying thicknesses of Al 2 O
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::101dc22461baff4af4233d34a3f0c0f4
https://doi.org/10.1109/transducers.2019.8808700
https://doi.org/10.1109/transducers.2019.8808700
Autor:
Nathan T. Eigenfeld, George D. Skidmore, Jonas C. Gertsch, Steven M. George, Victor M. Bright
Publikováno v:
Nanoscale. 7:17923-17928
Work presented here measures and interprets the electrical and thermal conductivities of atomic layer deposited (ALD) free-standing single film and periodic tungsten and aluminum oxide nanobridges with thicknesses from ∼5-20 nm and ∼3-13 nm, resp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a18a988f144d5d9c885586fdf1ee607b
https://doi.org/10.1039/c5nr04885k
https://doi.org/10.1039/c5nr04885k
Autor:
George D. Skidmore
Publikováno v:
Infrared Technology and Applications XLII.
The benefit of 10um pitch uncooled detectors is demonstrated through the use of image emulation. The image emulation uses the theoretical image of point sources for 10um wavelength radiation, then integrates the energy from multiple sources which fal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc09dff60f9864e6e57532735d62d03e
https://doi.org/10.1117/12.2229079
https://doi.org/10.1117/12.2229079
Autor:
Daniel S. Park, Arun Kumar C. Nallani, Gil-Sik Lee, Jeong-Bong Lee, George D. Skidmore, Moon J. Kim, Jeong-Soo Lee, DonKyu Cha
Publikováno v:
Microsystem Technologies. 16:367-373
We report the design, fabrication, and characterization of a multiple bent beam, sub-micron metallic electrothermal gripper. A bottom electroplating mold for electrodes was patterned using electron beam lithography in an SU-8, followed by nickel elec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1f62c6f645eacda5937de8d1f0ae58c8
https://doi.org/10.1007/s00542-009-0939-6
https://doi.org/10.1007/s00542-009-0939-6
Publikováno v:
Microsystem Technologies. 14:1621-1626
We report our study on several de-tethering methods for various high aspect ratio metallic and polymeric MEMS and NEMS parts including 5:1 aspect ratio 50 μm thick metallic (nickel) MEMS parts, 3:1 aspect ratio 1 μm thick sub-micron (350 nm) featur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3bb1c43bc7b7bfc14396afdfaec781c1
https://doi.org/10.1007/s00542-008-0579-2
https://doi.org/10.1007/s00542-008-0579-2
Autor:
George D. Skidmore, Jason M. Gray, Victor M. Bright, Steven M. George, Jonas C. Gertsch, Nathan T. Eigenfeld
Publikováno v:
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
This paper presents the first reported specific heat capacity measurements of ultra-thin atomic layer deposited W/Al 2 O 3 thin films. The thermal time constants of suspended ALD nanobridges were measured and a new model was derived to fit the data a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2f85b2c0f8265e858dda87da7b2a31d0
https://doi.org/10.1109/transducers.2015.7181191
https://doi.org/10.1109/transducers.2015.7181191
Autor:
Igor Gory, Fadziso M. Mantiziba, Bruce E. Gnade, Corina Nistorica, Jun Fu Liu, George D. Skidmore
Publikováno v:
Thin Solid Films. 492:6-12
This work reports layer-by-layer deposition of zirconium oxide on a Si surface from aqueous solutions using the successive ionic layer adsorption and reaction technique. The process consists of repeated cycles of adsorption of zirconium precursors, w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c5f1d0fb2ceb2d004e57be3233d73fb3
https://doi.org/10.1016/j.tsf.2005.06.014
https://doi.org/10.1016/j.tsf.2005.06.014
Autor:
Bruce E. Gnade, Corina Nistorica, Fadziso M. Mantiziba, George D. Skidmore, Jiyoung Kim, Igor Gory, Jun Fu Liu
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:836-840
This article describes a study of the static friction and wear of coated microelectromechanical systems (MEMS) surfaces using thermally actuated friction microdevices. In order to characterize static friction and wear, a tribological deep reactive io
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e6a7a9f606de353b88267818349b5c85
https://doi.org/10.1116/1.1885022
https://doi.org/10.1116/1.1885022
Publikováno v:
Journal of Engineering Materials and Technology. 127:90-96
Plastic deformation of polysilicon at high temperatures under stress due to creep has been demonstrated at the micro scale. This type of material behavior is generally associated with mechanical failure, however it can also be used to permanently def
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e42f34b16e5f7f307e08354e4cabcf09
https://doi.org/10.1115/1.1839214
https://doi.org/10.1115/1.1839214
Autor:
George D. Skidmore, T. Huang, A. Kim, Erik T. Nilsen, Jeong-Bong Lee, Kabseog Kim, Matt Ellis
Publikováno v:
Microsystem Technologies. 10:689-693
This paper presents design, fabrication, and characterization of easy-to-handle electroplated nickel microgrippers with SU-8 adaptors for heterogeneous micro/nano assembly applications. Two distinctive designs of microgrippers as end-effectors of mic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b07f73a8e40d671adb0ffeebef3e8fbc
https://doi.org/10.1007/s00542-004-0367-6
https://doi.org/10.1007/s00542-004-0367-6