Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Georg Janisch"'
Publikováno v:
IFAC-PapersOnLine. 55:307-312
Autor:
Christian Schwaer, Andreas Sinn, Daniel Wertjanz, Thomas Riel, Georg Janisch, Georg Schitter, Andras Galffy
Publikováno v:
Advances in Space Research. 65:1333-1343
This paper investigates the motion control system of an optical telescope system used for precision satellite tracking and ranging applications. The system uses direct-drive permanent magnet synchronous motors (PMSMs) for high precision positioning.
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Optical profilometer measurements are contact-free and fast. The depth of single high-aspect-ratio trenches and the step height of opaque materials can be measured. Deep trenches (50–225 µm) are measured with a white light interferometer. Shallowe
Publikováno v:
SNE Simulation Notes Europe. 25