Zobrazeno 1 - 2
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pro vyhledávání: '"Gentile, Mattia Gianfranco"'
Autor:
Gentile, MATTIA GIANFRANCO, Muñoz, Tabares, J. A., Chiodoni, A., Sgorlon, C., Para, I., Carta, R., Richieri, G., Bejtka, K., Merlin, L., Vittone, Ettore
Publikováno v:
Thin Solid Films. 612:165-171
DC magnetron sputtering is a commonly used technique for the fabrication of silicon based electronic devices, since it provides high deposition rates and uniform large area metallization. However, in addition to the thickness uniformity, coating opti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d1d37336424acda5efaaeac4015689ca
https://doi.org/10.1016/j.tsf.2016.05.057
https://doi.org/10.1016/j.tsf.2016.05.057
