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Publikováno v:
Electronics; Volume 11; Issue 2; Pages: 176
New theoretical and experimental results of microwave acoustic wave propagation in diamond-based multilayer piezoelectric structures (MPS) as “Me1/(Al,Sc)N/Me2/(100) diamond/Me3” and “Me1/AlN/Me2/(100) diamond/Me3” under three metal film depo
Publikováno v:
Electronics, Vol 11, Iss 176, p 176 (2022)
New theoretical and experimental results of microwave acoustic wave propagation in diamond-based multilayer piezoelectric structures (MPS) as “Me1/(Al,Sc)N/Me2/(100) diamond/Me3” and “Me1/AlN/Me2/(100) diamond/Me3” under three metal film depo
Autor:
Boris Sorokin, Gennady Kvashnin, Nikita Asafiev, Konstantin Kravchuk, Nikolay Luparev, Andrey Sotnikov
Publikováno v:
2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF).
Sensory properties of diamond-based HBAR were investigated by means of the Al, Sc, Mo and Pt thin and ultrathin film deposition. First the operational frequency ∼20 GHz of a sensor having a comparatively high $Q$ factor was applied with an aim decr