Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Genjima, Hisashi"'
Autor:
Marc Demand, Takahiro Shiozawa, Kathleen Nafus, Soichiro Okada, Yannick Feurprier, Luka Kljucar, Ainhoa Romo Negreira, Danilo De Simone, Arnaud Dauendorffer, Philippe Foubert, Hiroki Tadatomo, Yuya Kamei, Onitsuka Tomoya, Genjima Hisashi, Makoto Muramatsu, Noriaki Nagamine, Seiji Nagahara, Noriaki Oikawa, Satoru Shimura, Dinh Congque, Keisuke Yoshida, Shinichiro Kawakami
Publikováno v:
International Conference on Extreme Ultraviolet Lithography 2021.
EUV (extreme ultraviolet) lithography is progressively being inserted in high volume manufacturing of semiconductors to keep up with node shrinkage. However, defectivity remains one big challenge to address in order to be able to exploit its full pot
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4517dd998317cde099bfa2ee8b509c71
https://doi.org/10.1117/12.2600860
https://doi.org/10.1117/12.2600860
Autor:
Guerrero, Douglas, Amblard, Gilles R., Nagahara, Seiji, Dauendorffer, Arnaud, Thiam, Arame, Liu, Xiang, Kuwahara, Yuhei, Dinh, Cong Que, Okada, Soichiro, Kawakami, Shinichiro, Genjima, Hisashi, Nagamine, Noriaki, Muramatsu, Makoto, Shimura, Satoru, Tsuboi, Atsushi, Nafus, Kathleen, Feurprier, Yannick, Demand, Marc, Ramaneti, Rajesh, Foubert, Philippe, De Simone, Danilo, Vendenberghe, Geert
Publikováno v:
Proceedings of SPIE; May 2023, Vol. 12498 Issue: 1 p124981G-124981G-10, 12373130p
Autor:
Bannister, Julie, Mohanty, Nihar, Tadatomo, Hiroki, Dauendorffer, Arnaud, Onitsuka, Tomoya, Genjima, Hisashi, Ido, Yasuyuki, Okada, Soichiro, Kuwahara, Yuhei, Hara, Arisa, Dinh, Congque, Fujimoto, Seiji, Kawakami, Shinichiro, Muramatsu, Makoto, Shimura, Satoru, Nafus, Kathleen, Oikawa, Noriaki, Ono, Kenta, Feurprier, Yannick, Demand, Marc, Negreira, Ainhoa Romo, Nagahara, Seiji, Victor, Blanco, Foubert, Philippe, De Simone, Danilo
Publikováno v:
Proceedings of SPIE; May 2022, Vol. 12056 Issue: 1 p120560F-120560F-7, 1085048p
Autor:
Nagahara, Seiji, Dauendorffer, Arnaud, Thiam, Arame, Liu, Xiang, Kuwahara, Yuhei, Dinh, Cong Que, Okada, Soichiro, Kawakami, Shinichiro, Genjima, Hisashi, Nagamine, Noriaki, Muramatsu, Makoto, Shimura, Satoru, Tsuboi, Atsushi, Nafus, Kathleen, Feurprier, Yannick, Demand, Marc, Ramaneti, Rajesh, Foubert, Philippe, De Simone, Danilo, Vendenberghe, Geert
Publikováno v:
Proceedings of SPIE; 4/11/2023, Vol. 12498, p124981G-124981G-10, 1p
Autor:
Tadatomo, Hiroki, Dauendorffer, Arnaud, Onitsuka, Tomoya, Genjima, Hisashi, Ido, Yasuyuki, Okada, Soichiro, Kuwahara, Yuhei, Hara, Arisa, Dinh, Congque, Fujimoto, Seiji, Kawakami, Shinichiro, Muramatsu, Makoto, Shimura, Satoru, Nafus, Kathleen, Oikawa, Noriaki, Ono, Kenta, Feurprier, Yannick, Demand, Marc, Negreira, Ainhoa Romo, Nagahara, Seiji
Publikováno v:
Proceedings of SPIE; 1/23/2022, Vol. 12056, p120560F-120560F-7, 1p