Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Geng-Rui Zhao"'
Publikováno v:
Surface Review and Letters. 28:2050045
Hydrogenated diamond-like carbon (DLC) films were deposited by DC-pulse plasma-enhanced chemical vapor deposition (PECVD) under the different electrode distances. Effects of the electrode distances on the microstructural, mechanical, and tribological
Publikováno v:
Surface and Interface Analysis. 47:903-910
Fullerene-like hydrogenated carbon films were deposited on Si substrate by plasma-enhanced chemical vapor deposition. The microstructures of films were characterized by high-resolution transmission electron microscopy and Raman spectrum. The tribolog