Application of mechanical-technology CAD to microelectronic device design and manufacturing.

Autor: Maseeh, F., Harris, R.M., Boning, D.S., Heytens, M.L., Gelston, S.A., Senturia, S.D.

Publikováno v: Ninth IEEE/CHMT International Symposium on Electronic Manufacturing Technology, Competitive Manufacturing for the Next Decade; 1990, p350-355, 6p