Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Geir Bjørnsen"'
Publikováno v:
Journal of Applied Polymer Science. 119:888-895
Soft polydimethylsiloxane (PDMS) elastomers spin coated on silicon wafers are patterned using plasma etching. The elastomers are formed by mixing vinyl-terminated PDMS (prepolymer) and crosslinker containing hydride sites. The elastomers are made sof
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::21980e732aa1a4a96b100bf308bd1eca
https://doi.org/10.1002/app.32760
https://doi.org/10.1002/app.32760
Publikováno v:
Microelectronic Engineering. 87:67-71
Plasma etching of three different polydimethylsiloxane elastomers has been studied. One elastomer was a commercially available kit (Sylgard-184) and the other two were made by mixing individual components. The etching was done in a multi-wafer tool.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8fc8b7b7e82f2af92384e90c858b1089
https://doi.org/10.1016/j.mee.2009.05.024
https://doi.org/10.1016/j.mee.2009.05.024
Autor:
Jaan Roots, Geir Bjørnsen
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 29:011001
Films made of polydimethylsiloxane elastomers have been etched using reactive ion etching. The elastomers are etched using different mixtures of CF4, SF6, and O2 as process gases. The etch rate and profile of the etched area are measured as function
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::50b68150a9132ab170bd5cb49ef677b7
https://doi.org/10.1116/1.3521489
https://doi.org/10.1116/1.3521489