Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Geerten Kramer"'
Publikováno v:
1st Annual IEEE Conference on Control Technology and Applications, CCTA 2017, 2017-January, 726-731
CCTA
CCTA
Correct functionality of semiconductor devices depends on the overlay performance between device layers. Future smaller device features consequently require more accurate overlay metrology tools. In this paper we present a large dynamic range AFM ove
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7ccfd54959defd53396ad0c1c6ececa6
https://doi.org/10.1109/CCTA.2017.8062548
https://doi.org/10.1109/CCTA.2017.8062548
Publikováno v:
Precision Engineering. 35:607-624
Aspherical and freeform optics are applied to reduce geometrical aberrations as well as to reduce the required number of components, the size and the weight of the system. To measure these optical components with nanometre level uncertainty is a chal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::004f12f5fe84ff52ff242e8aa5398621
https://doi.org/10.1016/j.precisioneng.2011.04.004
https://doi.org/10.1016/j.precisioneng.2011.04.004
