Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Gazi Tanriseven"'
Autor:
Tom Wallow, Deniz E. Civay, Anita Fumar-Pici, Jeffrey A. Schefske, Raymond Maas, Coen Verspaget, S. Wang, Joerg Mallman, Y. van Dommelen, Mandeep Singh, H. F. Hoefnagels, Steven G. Hansen, Gazi Tanriseven
Publikováno v:
SPIE Proceedings.
The major challenge for EUV resists at 22 nm half-pitch and below continues to be simultaneously achieving resolution, sensitivity, and line-width roughness (LWR) targets. An ongoing micro-exposure tool (MET) based evaluation of leading resists throu
Autor:
Ofer Rotlevi, Ilan Englard, Raf Stegen, Lior Levin, Rich Piech, Eran Valfer, Peter Vanoppen, Shalev Dror, Inge Lamers, R. Schreutelkamp, Mireia Blanco Mantecon, Eitan Binyamini, Gazi Tanriseven, Nurit Raccah, Ted der Kinderen, Frank Duray, Erik van Brederode, Ingrid Minnaert-Janssen
Publikováno v:
SPIE Proceedings.
Immersion lithography offers great benefit for advanced technology nodes but at the same time poses a great challenge. Along with hyper NA values, which increase the scanner resolution, new types of imaging process related defects emerge. These new d