Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Gayathri Raghavendra"'
Publikováno v:
SPIE Proceedings.
The BCT solution is an automatic correction for systematic offset built into the PCS product based on calibration from 2-5 wafers. This paper explores the validity of a predictive model for process control for use by manufacturers of semiconductor de
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::238d192b39f931e2de333516ccc27558
https://doi.org/10.1117/12.536454
https://doi.org/10.1117/12.536454
Publikováno v:
SPIE Proceedings.
The need for process control in the semiconductor industry has been established and the benefits have been demonstrated. In the past, process control applications in the semiconductor manufacturing have relied on univariable control schemes. In the c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::915d2a37472e2f13e49bd4ffa9863c8c
https://doi.org/10.1117/12.536472
https://doi.org/10.1117/12.536472
Autor:
Kenneth C. Johnson, Makoto Miyagi, Hsu-Ting Huang, Cristina Cheung, Apo Sezginer, Fred E. Stanke, Michelle L. Zimmerman, Bhanwar Singh, Gayathri Raghavendra
Publikováno v:
SPIE Proceedings.
Scatterometry provides a new, vibration-tolerant technique of overlay metrology. Gauge repeatability and reproducibility is improved by an order of magnitude over imaging-based overlay metrology. To measure the overlay of patterned layers A and B by
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e412c10f315c64a76593cffa5a678d33
https://doi.org/10.1117/12.483668
https://doi.org/10.1117/12.483668