Optical attachment for conversion shape and divergence of KrF laser beam

Autor: Zhevlakov, Alexander P., Grishkanich, A.S., Kascheev, S.V., Gavrilov, Evgenij V., Kujanpää, Veli

Publikováno v: Zhevlakov, A P, Grishkanich, A S, Kascheev, S V, Gavrilov, E V & Kujanpää, V 2015, Optical attachment for conversion shape and divergence of KrF laser beam . in 4th EOS Conference on Manufacturing and Testing of Optical Components : EOSMTOC 2015 . European Optical Society (EOS), pp. 66-67, 4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015, Munich, Germany, 22/06/15 .

The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this uni

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https://cris.vtt.fi/en/publications/6f609279-1df4-46b9-b139-a80c3acd2bdf