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pro vyhledávání: '"Gary DeHaan"'
Autor:
Greg Scott Long, Terry Mcmahon, David Douglas Hall, Mark Johnson, Craig Sanders, Ruhua Cai, William F. Stickle, Donald W. Schulte, Gary DeHaan
Publikováno v:
International Symposium for Testing and Failure Analysis.
A novel SCM oxide preparation technique using a low temperature O2 plasma treatment is presented. Experimental results demonstrated that oxides of sufficient quality for scanning capacitance measurement analysis can be obtained on both top down and e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e72ed30c043aaa982f63d76aeccd33fe
https://doi.org/10.31399/asm.cp.istfa2009p0140
https://doi.org/10.31399/asm.cp.istfa2009p0140
