Výsledky vyhledávání - "Gary A. DePinto"

Optimizing Polysilicon Deposition for Film Uniformity and Particles

Autor: Gary A. DePinto

Publikováno v: Journal of the IEST. 36:31-38

This paper describes a three-step approach to characterize a low-pressure chemical vapor deposition (LPCVD) flat polysilicon process. The first step was to design and construct a flat polysilicon deposition furnace for reduced defectivity and improve

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::1688fc29a2b61fd91e29ed42366f9d03
https://doi.org/10.17764/jiet.2.36.4.h705u465h6801318

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Strategy for continuous improvement in IC manufacturability, yield, and reliability

Autor: Joe Steinberg, Mark Berry, Phil Schani, Michael Phillips, Dean J. Dreier, Gary A. DePinto

Publikováno v: SPIE Proceedings.

Continual improvements in yield, reliability and manufacturability measure a fab and ultimately result in Total Customer Satisfaction. A new organizational and technical methodology for continuous defect reduction has been established in a formal fee

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f4c3c67369f6459334fdb69a5eacb24e
https://doi.org/10.1117/12.139359

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