Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Garry Bordonaro"'
Autor:
Shuhan Ding, Yiling Peng, Benyamin Davaji, Peter C. Doerschuk, Amit Lal, Jeremy Clark, Garry Bordonaro, Vincent Genova, Christopher K. Ober, Steve Ayres, Marco Heuser
Publikováno v:
2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1cd8ef724bce2ebb83af744951329ea3
https://doi.org/10.1109/asmc57536.2023.10121128
https://doi.org/10.1109/asmc57536.2023.10121128
Autor:
Benyamin Davaji, Peter A Cook, Bahar Kor, Ziwang Luo, Jiaxian Chen, Jeremy Clark, Garry Bordonaro, Vincent Genova, Marco Heuser, Steve Ayres, Christopher K Ober, Peter C Doerschuk, Amit Lal
Publikováno v:
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::af02d9e917277eaa472c9b9a47d9113f
https://doi.org/10.1109/mems51670.2022.9699471
https://doi.org/10.1109/mems51670.2022.9699471
Autor:
John Treichler, Vincent Genova, Garry Bordonaro, Amy Lazicki, Cynthia Bolme, Wendy L. Mao, Jon Eggert, Richard C. Tiberio, Arianna Gleason, Suzanne Ali
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 30:06F306
Electron beam lithography and photolithography were used to fabricate diffraction gratings on targets for laser-driven shock-wave experiments. This target design was used with an optical interferometric system to measure transverse wave motion of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eb8e907d3fd0b65c582bd5f98a3cb8be
https://doi.org/10.1116/1.4767323
https://doi.org/10.1116/1.4767323