Probing the onset of wurtzite phase formation in (V,Al)N thin films by transmission electron microscopy and atom probe tomography

Autor: Marcus Hans, Zsolt Czigány, Deborah Neuß, Janis A. Sälker, Holger Rueß, Janina Krause, Ganesh K. Nayak, David Holec, Jochen M. Schneider

Publikováno v: Surface and coatings technology 442, 128235 (2022). doi:10.1016/j.surfcoat.2022.128235 special issue: "Special Issue of Surface and Coatings Technology celebrating the pioneering research career of Professor Allan Matthews in the field of "Plasma-based Surface Engineering""

Surface and coatings technology 442, 128235 (2022). doi:10.1016/j.surfcoat.2022.128235 special issue: "Special Issue of Surface and Coatings Technology celebrating the pioneering research career of Professor Allan Matthews in the field of "Plasma-bas

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