Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Gallet Isabelle"'
Publikováno v:
EPJ Web of Conferences, Vol 287, p 01001 (2023)
Inductively coupled plasma chemical vapor deposition was used to obtain thin films of siliconrich silicon nitride with a refractive index of 2.44 at optical telecommunications wavelength. The resulting layer was patterned into a 1.6 μm wide waveguid
Externí odkaz:
https://doaj.org/article/7076d2090c0743389d3ac2c07fb254b2
Akademický článek
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Autor:
Brunet, Magali, Scheid, Emmanuel, Galicka-Fau, Karolina, Andrieux, Michel, Legros, Corinne, Gallet, Isabelle, Herbst, Michaële, Schamm, Sylvie
Publikováno v:
In Microelectronic Engineering 2009 86(10):2034-2037
Autor:
Brunet, Magali, Scheid, Emmanuel, Galicka-Fau, Karolina, Andrieux, Michel, LEGROS, Corinne, Gallet, Isabelle, Herbst, Michaële, Schamm-Chardon, Sylvie
Publikováno v:
Microelectronic Engineering
Microelectronic Engineering, Elsevier, 2009, 86 (10), pp.2034-2037. ⟨10.1016/j.mee.2009.01.034⟩
Microelectronic Engineering, 2009, 86 (10), pp.2034-2037. ⟨10.1016/j.mee.2009.01.034⟩
Microelectronic Engineering, Elsevier, 2009, 86 (10), pp.2034-2037. ⟨10.1016/j.mee.2009.01.034⟩
Microelectronic Engineering, 2009, 86 (10), pp.2034-2037. ⟨10.1016/j.mee.2009.01.034⟩
International audience; The present work deals with high-density integrated capacitors for output filters in future micro DC-DC converters. To reach high capacitance density, 3D structures were created in silicon with DRIE followed by MOCVD of ZrO2 (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::1b6cf6422ff1e8efdf1e0892a4a49887
https://hal.archives-ouvertes.fr/hal-01443057/file/MEE-S-08-01224-2.pdf
https://hal.archives-ouvertes.fr/hal-01443057/file/MEE-S-08-01224-2.pdf
Autor:
Galicka, Karolina, Andrieux, Michel, Legros, Corinne, Herbst, Michaele, Gallet, Isabelle, Brunet, Magali, Scheid, Emmanuel, Schamm, Sylvie
Publikováno v:
ECS Transactions; September 2009, Vol. 25 Issue: 8 p1121-1128, 8p
Autor:
Galicka-Fau, Karolina, Andrieux, Michel, Legros, Corinne, Herbst-Ghysel, Michaële, Gallet, Isabelle, Brunet, Magali, Scheid, Emmanuel, Schamm, Sylvie
Publikováno v:
ECS Transactions; September 2009, Vol. 25 Issue: 8
Publikováno v:
ECS Transactions; September 2009, Vol. 25 Issue: 8
Autor:
Brunet, Magali1 mbrunet@laas.fr, Scheid, Emmanuel1, Galicka-Fau, Karolina2, Andrieux, Michel2, Legros, Corinne2, Gallet, Isabelle2, Herbst, Michaële2, Schamm, Sylvie3
Publikováno v:
Microelectronic Engineering. Oct2009, Vol. 86 Issue 10, p2034-2037. 4p.