Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Galina Alekseevna Bleykher"'
Autor:
Alena Olegovna Borduleva, Galina Alekseevna Bleykher, Dmitrii Vladimirovich Sidelev, Valeriy Pavlovich Krivobokov
Publikováno v:
Acta Polytechnica, Vol 56, Iss 6, Pp 425-431 (2016)
This work focuses on erosion and thermal processes taking place on the surface of the titanium target in magnetron sputtering. The study was carried out using magnetron sputtering systems (MSS) with different thermal insulation target types from the
Externí odkaz:
https://doaj.org/article/9a4e3ad64d3e47b2a4605edb72b49a8e
Publikováno v:
Acta Polytechnica, Vol 56, Iss 6, Pp 425-431 (2016)
This work focuses on erosion and thermal processes taking place on the surface of the titanium target in magnetron sputtering. The study was carried out using magnetron sputtering systems (MSS) with different thermal insulation target types from the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cf70acd49dd85181901b1c6cc0dc51c2
https://ojs.cvut.cz/ojs/index.php/ap/article/view/3766
https://ojs.cvut.cz/ojs/index.php/ap/article/view/3766