Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Gal Peled"'
Publikováno v:
Actuators, Vol 5, Iss 2, p 15 (2016)
Piezoelectric ultrasonic motors offer important advantages for motion applications where high speed is coupled with high precision. The advances made in the recent decades in the field of ultrasonic motor based motion solutions allow the construction
Externí odkaz:
https://doaj.org/article/742bee947c9a4b5088934ada48887393
Publikováno v:
Photonic Instrumentation Engineering VII.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bbfbf91378dec2f2d458bf0bb1f0a158
https://doi.org/10.1117/12.2546347
https://doi.org/10.1117/12.2546347
Publikováno v:
Photonic Instrumentation Engineering VII.
The Semiconductor industry’s evolution towards 7, 5 and 3 nm nodes at higher throughputs, poses a challenge on motion systems. Motion systems are expected to yield a sub nanometer accuracy and velocity higher than 500 mm/sec, fast move and settle,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2f542fa98ca936904f8c3d144121de09
https://doi.org/10.1117/12.2546283
https://doi.org/10.1117/12.2546283
Autor:
Alan Feinstein, Vadim Derechinsky, Gal Peled, Israel Shayer, Rita Yetkariov, Roman Yasinov, Nir Karasikov
Publikováno v:
Long-Range Imaging III.
A series of high performance gimbal payloads were developed. Both pan and tilt motion axes are driven by compact, ultrasonic, direct drive piezoelectric motors. The motors provide fast response, high motion stiffness and natural frequency, high preci
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ad890eba44721fb7610e3e909cd52b7d
https://doi.org/10.1117/12.2311454
https://doi.org/10.1117/12.2311454
Publikováno v:
Photonic Instrumentation Engineering V.
A range of heavy duty, ultra-precise motion stages had been developed for precise positioning in semiconductor manufacturing and metrology, for use in a clean room and high vacuum (HV and UHV) environments, to meet the precision requirements for 7, 5
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dcd865cd18e1774024d223d15952e697
https://doi.org/10.1117/12.2289804
https://doi.org/10.1117/12.2289804
Publikováno v:
SPIE Proceedings.
Piezoelectric motors and actuators are characterized by direct drive, fast response, high positioning resolution and high mechanical power density. These properties are beneficial for optical devices such as gimbals, optical image stabilizers and mir
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9a0437acd7c737c4b14c0320d08b3e75
https://doi.org/10.1117/12.2262620
https://doi.org/10.1117/12.2262620
Publikováno v:
Airborne Intelligence, Surveillance, Reconnaissance (ISR) Systems and Applications XIII.
Piezo motors are characterized by higher mechanical power density, fast response and direct drive. These features are beneficial for miniature gimbals. A gimbal based on such motors was developed. Diameter is 58 mm, weight is 190 grams. The gimbal ca
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0e1fa32bbf570ac84409f6ebfc3f565e
https://doi.org/10.1117/12.2225623
https://doi.org/10.1117/12.2225623
Publikováno v:
Actuators, Vol 5, Iss 2, p 15 (2016)
Piezoelectric ultrasonic motors offer important advantages for motion applications where high speed is coupled with high precision. The advances made in the recent decades in the field of ultrasonic motor based motion solutions allow the construction
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b2b7ad37efacbe63f4d33b721c511d13
https://doi.org/10.3390/act5020015
https://doi.org/10.3390/act5020015