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pro vyhledávání: '"G.M. Prinz"'
Autor:
H. Huebner, D. Kueck, Andreas Munding, Rolf Sauer, G.M. Prinz, E. Kohn, P. Benkart, A. Heittmann, A. Kaiser
Publikováno v:
Diamond and Related Materials. 15:1967-1971
In this investigation we present a novel technology for three-dimensional integration of diamond sensors and actuators. Based on a previously developed technology for the integration of a 3-D CMOS camera stack, in this attempt nano-crystalline diamon