Zobrazeno 1 - 10
of 82
pro vyhledávání: '"G.D. Wilk"'
Publikováno v:
Solid-State Electronics. 50:1012-1015
We report detailed current-transport studies of ultrathin Al 2 O 3 dielectrics on GaAs grown by atomic layer deposition (ALD) as a function of film thickness, ambient temperature and electric field. The leakage current in ultrathin Al 2 O 3 on GaAs i
Publikováno v:
Solid-State Electronics. 49:790-794
Oxide surface passivation grown by atomic layer deposition (ALD) has been applied to GaAs metal–semiconductor field-effect transistors (MESFETs). The breakdown characteristic of a MESFET is greatly improved by both Al2O3 and HfO2 passivation. Three
Autor:
Don Monroe, Gregory Timp, Frieder H. Baumann, Yi Ma, P. J. Silverman, D. Hwang, Muhammad A. Alam, B. E. Weir, J. Bude, A. Hamad, M.M. Brown, A. Ghetti, G.D. Wilk, T.W. Sorsch
Publikováno v:
Solid-State Electronics. 46:321-328
We describe the reliability projection methods currently used and show that 1.6 nm oxides are sufficiently reliable even if soft breakdown is considered the point of failure. We also explore the possibility of using oxides after soft breakdown.
Autor:
S. Aravamudhan, F. Klemens, M.D. Morris, B Busch, P. J. Silverman, Martin L. Green, R. B. van Dover, G.D. Wilk, T.W. Sorsch, L. Manchanda
Publikováno v:
Microelectronic Engineering. 59:351-359
The exponential growth of the silicon industry can be attributed to that fact that silicon has a native oxide that is silicon dioxide. With SiO 2 soon approaching its fundamental limit, we must find an alternate to SiO 2 or a new switch to replace MO
Autor:
G.D. Wilk, M.A. Gribelyuk
Publikováno v:
Thin Solid Films. 339:51-57
The microstructure of the MBE-grown Si/CaF 2 /Si (111) heterostructures is studied by high resolution transmission electron microscopy (HRTEM). Two distinct interface structure models have been identified from comparison with image simulations. In th
Publikováno v:
Materials Science and Engineering: B. 135:282-284
We report on a GaN metal-oxide-semiconductor field-effect-transistor (MOSFET) using atomic-layer-deposited (ALD) Al2O3 as the gate dielectric. Compared to a GaN metal-semiconductor field-effect-transistor (MESFET) of similar design, the MOSFET exhibi
Publikováno v:
IEEE Electron Device Letters. 21:569-571
Partially crystalline, silicon suboxide (SiO/sub x/, 0
Publikováno v:
IEEE Electron Device Letters. 20:132-134
We have developed a method for controllably and reproducibly growing self-limiting ultrathin oxides with excellent electrical properties in the range /spl sim/10-25 /spl Aring/ thick at temperatures ranging from 25 to 600/spl deg/C, respectively, usi
Publikováno v:
2005 International Semiconductor Device Research Symposium.
Al2O3 is a widely used insulating material for gate dielectric, tunneling barrier and protection coating due to its excellent dielectric properties, strong adhesion to dissimilar materials, and its thermal and chemical stability. Al2O3 has a high ban
Publikováno v:
Proceedings. IEEE Lester Eastman Conference on High Performance Devices, 2004..
We report on a GaN metal-oxide-semiconductor high electron mobility transistor (MOS-HEMT) using atomic layer deposition (ALD) Al/sub 2/O/sub 3/ film as a gate dielectric and for surface passivation simultaneously. Compared to the conventional AlGaN/G