Zobrazeno 1 - 1
of 1
pro vyhledávání: '"G. S. Strossman"'
Publikováno v:
MRS Proceedings. 386
Direct surface analysis of Si wafers and environmental materials such as polymers for wafer carriers and for high purity water systems is important to identify contaminants and their sources. Organic contaminants on the surfaces are difficult to anal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3dabcd65cce73befc9021947ea48b1d1
https://doi.org/10.1557/proc-386-143
https://doi.org/10.1557/proc-386-143
