Zobrazeno 1 - 5
of 5
pro vyhledávání: '"G. R. Bogart"'
Autor:
G. R. Bogart, Jaime L. McClain, Robert J Simonson, Jeffrey W. Lantz, Paul C. Galambos, Michael S. Baker
Publikováno v:
Journal of Microelectromechanical Systems. 20:1150-1162
We present active electrostatic MEMS gas valves for Micro-Gas-Analyzer (MGA) flow control. These unique valves enable extremely low dead volume, highly integrated flow control chips for the MGA application, and potentially others (e.g., propulsion, p
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:3175-3184
The deposition of SiO2 films from novel alkoxysilane/O2 rf plasmas has been investigated using tetraethoxysilane and the novel alkoxysilanes, triethoxysilane, tetramethoxysilane, and trimethoxysilane. We have demonstrated that high quality SiO2 films
Autor:
R M, Ostroff, D, Maul, G R, Bogart, S, Yang, J, Christian, D, Hopkins, D, Clark, B, Trotter, G, Moddel
Publikováno v:
Clinical chemistry. 44(9)
Biological thin films may form on a surface by specific molecular interactions. The fixed polarizer ellipsometer (FPE) is a sensitive instrument that detects biological thin films either qualitatively or quantitatively. The design is simple and inexp
This communication describes our results using these novel alkoxysilane precursors for PECVD of SiO_2 films in an inductively coupled rf plasma reactor. The effects of deposition time, rf power, and organosilane pressure on the films’ characteristi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b25224a8e3d8b85cc92d611f60a248a6
https://resolver.caltech.edu/CaltechAUTHORS:20150622-144457314
https://resolver.caltech.edu/CaltechAUTHORS:20150622-144457314
Publikováno v:
X-Ray Spectrometry. 17:63-73
Five readily available fundamental parameters x-ray spectrometry programs were compared for their performance in a more or less routine laboratory environment. The programs were used to determine a variety of elements in cement, geological samples, l