Parametric study of aluminum nitride Lamb wave resonators

Autor: Emmanuel Defay, I. Kone, Alexandre Reinhardt, M. Gorisse, C. Billard, Marc Aid, G. Polo Filisan, Frederic Domingue

Publikováno v: Proceedings of 2010 IEEE International Ultrasonics Symposium, IUS 2010
IEEE International Ultrasonics Symposium, IUS 20
IEEE International Ultrasonics Symposium, IUS 20, 2010, San Diego, CA, United States. pp.2087-2090, ⟨10.1109/ULTSYM.2010.5935720⟩

In this paper, we propose a parametric study of aluminum nitride Lamb wave resonators. A Film Bulk Acoustic Resonator (FBAR) technology was used and integrated on a 200 mm silicon substrates process flow performed on a standard CMOS fabrication line.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::07ce43721b3a99af21fecfdb926ff9c8
https://doi.org/10.1109/ultsym.2010.5935720