Zobrazeno 1 - 2
of 2
pro vyhledávání: '"G. O. Vladimirov"'
Publikováno v:
Russian Microelectronics. 32:200-204
The thermal oxidation of GaAs and InP is investigated when Al2(SO4)3 is introduced into the oxidizing atmosphere. It is found that the stimulator accelerates the reaction in both cases. The process and films are examined by laser ellipsometry, IR spe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d14fd6e25a9b6530743b8ca9df8c5ff2
https://doi.org/10.1023/a:1024515229910
https://doi.org/10.1023/a:1024515229910
Publikováno v:
Russian Microelectronics; Jul2003, Vol. 32 Issue 4, p200-204, 5p