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Publikováno v:
Proceedings of the 1996 BIPOLAR/BiCMOS Circuits and Technology Meeting.
Minimizing R/sub bb/, C/sub ca/, and C/sub cb/ is crucial to maximizing the key figure of merit f/sub max/ in the SiGe HBT. Through a systematic scaling study of the extrinsic base-emitter sidewall spacer, we explore for the first time the trade-off