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Publikováno v:
IEEE Transactions on Nuclear Science. 26:1392-1394
Preliminary results from a possible method for obtaining information regarding the location, surface composition, and structure of a semiconductor device on an integrated circuit monolith using particle backscattering and x-ray detection techniques i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::198dda8eb5999b2ceede1532451e4d69
https://doi.org/10.1109/tns.1979.4330395
https://doi.org/10.1109/tns.1979.4330395
