Zobrazeno 1 - 1
of 1
pro vyhledávání: '"G. Kh. Allaerova"'
Publikováno v:
Technical Physics Letters. 47:11-15
The dynamics of changes in the crystal structure and in the elemental and chemical composition of Si surface layers implanted with Na+, Rb+, and Cs+ ions in the process of stepwise annealing under different temperature conditions has been studied. It