Zobrazeno 1 - 3
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pro vyhledávání: '"G. I. Fat'yanova"'
Autor:
G. I. Fat’yanova
Publikováno v:
Bulletin of the Russian Academy of Sciences: Physics. 71:1468-1473
The peculiarities of the design of tiny elements of electron optics—electron lenses used in the microsystem electron-beam technique, and their difference from conventional electron lenses that are applied in modern electron-beam equipment have been
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f21df27ae71288fba0c0083db53a7db8
https://doi.org/10.3103/s1062873807100346
https://doi.org/10.3103/s1062873807100346
Autor:
B. N. Vasichev, G. I. Fat’yanova
Publikováno v:
Bulletin of the Russian Academy of Sciences: Physics. 71:1463-1467
The prospects of developing tiny multibeam systems for electron lithography have been considered. Designs of tiny basic elements of electron-optical systems, including a magnetic lens with an open magnetic circuit and a lens with aligned axially symm
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::38a9b50d15076ec753cd9d0df24ff846
https://doi.org/10.3103/s1062873807100334
https://doi.org/10.3103/s1062873807100334
Autor:
G. I. Fat’yanova
Publikováno v:
Bulletin of the Russian Academy of Sciences: Physics. 71:1461-1462
A complex method of local microanalysis of samples, in which the analysis conditions depend on the orientation of the boundaries of heterogeneous objects, has been considered. X-ray and electron spectroscopy methods are simultaneously used. Applicati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6f060e9a86481c410d5d0b8dd8894433
https://doi.org/10.3103/s1062873807100322
https://doi.org/10.3103/s1062873807100322