Zobrazeno 1 - 10
of 132
pro vyhledávání: '"G. Gousset"'
Publikováno v:
Plasma Processes and Polymers. 4:S973-S977
The low-pressure high-current wire discharge has been numerically studied. The computation is performed when particle-in-cell Monte Carlo (PIC-MC) simulation attains the steady state after the sheaths formation and the hollow-cathode discharge regime
Publikováno v:
Plasma Processes and Polymers. 4:S960-S964
This paper focuses on the experimental validation of the 2D fluid model developed for magnetron discharges. Numerical simulations have been applied to an axi-symmetric planar direct current (DC) magnetron working in Ar at low pressures, in the range
Publikováno v:
Europhysics Letters (EPL). 74:431-437
Numerical study of a self-sustained low-pressure (6.8 Pa or 50 mTorr) wire discharge in helium is reported. The current-independent voltage drop across the cathode sheath is found to be of 250 V. The other part of the discharge voltage is essentially
Publikováno v:
Plasma Sources Science and Technology. 14:168-176
A two-dimensional (r, z) time-dependent fluid model was developed and used to describe a dc planar magnetron discharge with cylindrical symmetry. The transport description of the charged species uses the corresponding first three moments of the Boltz
Publikováno v:
Repositório Científico de Acesso Aberto de Portugal
Repositório Científico de Acesso Aberto de Portugal (RCAAP)
instacron:RCAAP
Repositório Científico de Acesso Aberto de Portugal (RCAAP)
instacron:RCAAP
The paper presents a systematic characterization of pure hydrogen capacitively coupled discharges, produced in a parallel plate cylindrical setup. A two-dimensional, time-dependent fluid model is used to describe the production, transport, and destru
Autor:
J. Bretagne, C Boisse Laporte, D Pagnon, Tiberiu Minea, L. de Poucques, G. Gousset, O Leroy, Michel Touzeau
Publikováno v:
Plasma Sources Science and Technology. 12:S33-S42
In this paper, which deals with physical processes and problems that are involved in magnetron discharges used for the deposition of thin films and material coatings, we emphasize the aspects connected to discharge physics: energy deposition, behavio
Publikováno v:
IEEE Transactions on Plasma Science. 31:572-586
The paper presents a fluid modeling of the nonequilibrium, dc-positive column of cylindrical gas discharges, by using a robust numerical code that describes the transport of electrons and positive ions, over a broad domain of pressures p/spl sime/100
Publikováno v:
Vacuum. 69:213-219
This paper reviews the formulation and updates some numerical procedures usually adopted in two-dimensional, time-dependent, fluid models to study the transport of charged particles in radio-frequency capacitively coupled discharges. The model solves
Publikováno v:
Plasma Sources Science and Technology. 11:448-465
This paper reviews the formulation and updates some numerical procedures usually adopted in two-dimensional, time-dependent fluid models to study the transport of charged particles in radio-frequency capacitively coupled discharges. The description o
Publikováno v:
Plasma Sources Science and Technology. 11:241-247
A kinetic model of low-pressure surface wave discharges in flowing oxygen has been used to study the remote microwave plasma enhanced CVD of silica. This work deals with the effect of pressure and microwave power on the computed concentrations of O2(