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pro vyhledávání: '"G. G. Lyahov"'
Autor:
E. S. Klement’ev, D. D. Efimov, V. N. Frolov, P. A. Prokopovich, G. G. Lyahov, O. V. Toropova, A. I. Grunin, D. N. Frolov, E. A. Severin, D. A. Serebrennikov, U. Yu. Koneva, V. V. Molchanov, Olga Dikaya, A. Yu. Goikhman
Publikováno v:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 12:744-755
The possibility of creating a laboratory UV photolithography setup with the help of commercially available components, such as optical-mechanical positioners and UV (ultraviolet) objective lenses, is discussed. Existing technical solutions concerning
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::75f1f73b6d44afe5d92303f5b3e57b0b
https://doi.org/10.1134/s1027451018040341
https://doi.org/10.1134/s1027451018040341
