Zobrazeno 1 - 2
of 2
pro vyhledávání: '"G. G. Lyahov"'
Autor:
E. S. Klement’ev, D. D. Efimov, V. N. Frolov, P. A. Prokopovich, G. G. Lyahov, O. V. Toropova, A. I. Grunin, D. N. Frolov, E. A. Severin, D. A. Serebrennikov, U. Yu. Koneva, V. V. Molchanov, Olga Dikaya, A. Yu. Goikhman
Publikováno v:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 12:744-755
The possibility of creating a laboratory UV photolithography setup with the help of commercially available components, such as optical-mechanical positioners and UV (ultraviolet) objective lenses, is discussed. Existing technical solutions concerning
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::75f1f73b6d44afe5d92303f5b3e57b0b
https://doi.org/10.1134/s1027451018040341
https://doi.org/10.1134/s1027451018040341
Autor:
Prokopovich, P. A., Frolov, D. N., Frolov, V. N., Klement’ev, E. S., Grunin, A. I., Dikaya, O. A., Koneva, U. Yu., Lyahov, G. G., Efimov, D. D., Serebrennikov, D. A., Molchanov, V. V., Severin, E. A., Toropova, O. V., Goikhman, A. Yu.
Publikováno v:
Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques; Jul2018, Vol. 12 Issue 4, p744-755, 12p