Structural properties of Si nanocrystals: implications for light emitting devices fabrication

Autor: A. Irrera 1, G. Franzò 1, M. Miritello 1, R. Lo Savio 1, S. Boninelli 1, F. Priolo 1, F. Iacona 2, G, Nicotra 2, C. Bongiorno 2, C. Spinella 2, S. Coffa 3

Publikováno v: Group IV Photonics, 2008 5th IEEE International Conference on, pp. 38–40, Sorrento (Italy), 17-19 Sept. 2008
info:cnr-pdr/source/autori:A. Irrera 1, G. Franzò 1, M. Miritello 1, R. Lo Savio 1, S. Boninelli 1, F. Priolo 1, F. Iacona 2, G, Nicotra 2, C. Bongiorno 2, C. Spinella 2, S. Coffa 3/congresso_nome:Group IV Photonics, 2008 5th IEEE International Conference on/congresso_luogo:Sorrento (Italy)/congresso_data:17-19 Sept. 2008/anno:2008/pagina_da:38/pagina_a:40/intervallo_pagine:38–40

In this work we investigate and compare the structural and optical properties of silicon-rich silicon oxide layers obtained by different deposition techniques, namely plasma enhanced chemical vapor deposition (PECVD) and RF magnetron sputtering. We d

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::25af54fc0c23b5e38a77f53c2ed39a31
http://www.cnr.it/prodotto/i/254694