Zobrazeno 1 - 10
of 92
pro vyhledávání: '"G. Ensell"'
Autor:
Stephen A. Wilson, G. Ensell, Roger W. Whatmore, Nicolas Evanno, Fabrice F.C. Duval, Markys G. Cain
Publikováno v:
Sensors and Actuators A: Physical. 133:35-44
This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical mo
Publikováno v:
Electrochimica Acta. 51:1423-1430
Scanning Photo-Induced Impedance Microscopy (SPIM) is an impedance imaging technique that is based on photocurrent measurements at field-effect structures. The material under investigation is deposited onto a semiconductor-insulator substrate. A thin
Publikováno v:
Sensors and Actuators A: Physical. :285-289
A microfabrication process for microcantilever paddles with magnetic resonating elements suitable for application in molecular probe chemistry is presented. The sensor will monitor the changes in the cantilever's resonant frequency due to accumulatio
Publikováno v:
Sensors and Actuators A: Physical. 115:476-482
A new masking technology for wet etching of glass, to a depth of more than 300µm, is reported. Various mask materials, which can be patterned by standard photolithography and metal etching processes, were investigated for glass etching in concentrat
Publikováno v:
Journal of Micromechanics and Microengineering. 12:780-785
We present a highly sensitive ultra-thin micromachined silicon cantilever beam with an integrated strain gauge on its root for optimizing piezoresistive readout. The mechanical characteristics and electrical readout of the cantilever beam, such as sp
Autor:
Steve Beeby, B Huang, A Brunnschweiler, Alan G. R. Evans, C G J Schabmueller, G. Ensell, Harald Sehr, I S Tomlin, Trevor Niblock
Publikováno v:
Journal of Micromechanics and Microengineering. 12:410-413
Thermal vertical bimorph actuators consist of silicon beams side-coated with aluminium. Upon heating they bend like a bimetal and produce movement in the wafer plane. We have measured the time constant describing the deflection response of the actuat
Publikováno v:
Journal of Micromechanics and Microengineering. 11:306-310
We have fabricated thermal actuators based on vertical bimorphs, which consist of silicon beams side-coated with aluminium. When they are heated by an electrical current they bend like a bimetal and produce movement in the wafer plane. The fabricatio
Autor:
A Brunnschweiler, J R Pollard, C G J Schabmueller, James S. Wilkinson, Alan G. R. Evans, G. Ensell
Publikováno v:
Journal of Micromechanics and Microengineering. 11:329-333
This paper reports on the design, fabrication, assembly and testing of a micromachined polymerase chain reaction (PCR) system with pigtailed fibre optics. Two major designs have been fabricated and tested. The first design uses two optical fibres, on
Publikováno v:
Microelectronics Journal. 32:517-526
A power integrated circuit process has been developed, based on silicon-on-insulator, which allows intelligent CMOS control circuitry to be placed alongside integrated high-voltage power devices. A breakdown voltage of 335 V has been obtained by usin
Autor:
J. Humphery, J.V. Subhas Chandra Bose, T.J. Pease, M.M. De Souza, G. Ensell, E.M. Sankara Narayanan
Publikováno v:
Microelectronics Journal. 32:323-326
A new termination structure, which incorporates metal field plate over every alternate low doped p well ring is presented for planar power devices. This structure is designed to control the punch through voltage between rings to increase the blocking