Zobrazeno 1 - 1
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pro vyhledávání: '"G V Liberova"'
Autor:
L. A. Balagurov, G V Liberova, E. A. Petrova, Andrei V. Sapelkin, B.A. Loginov, Bayram Unal, D. G. Yarkin, S Ya Andrushin
Publikováno v:
Semiconductor Science and Technology. 20:1217-1222
Porous silicon (PS) is an excellent material to be used as a sacrificial layer (SL) for the fabrication of membranes, bridges, cantilevers and other complicated micro-sensor structures. Major advantages of this material are its smooth surface and lar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0fdc0acad381cdae19bbfbaf3f458150
https://doi.org/10.1088/0268-1242/20/12/013
https://doi.org/10.1088/0268-1242/20/12/013
