Zobrazeno 1 - 4
of 4
pro vyhledávání: '"G V Liberova"'
Autor:
L. A. Balagurov, G V Liberova, E. A. Petrova, Andrei V. Sapelkin, B.A. Loginov, Bayram Unal, D. G. Yarkin, S Ya Andrushin
Publikováno v:
Semiconductor Science and Technology. 20:1217-1222
Porous silicon (PS) is an excellent material to be used as a sacrificial layer (SL) for the fabrication of membranes, bridges, cantilevers and other complicated micro-sensor structures. Major advantages of this material are its smooth surface and lar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0fdc0acad381cdae19bbfbaf3f458150
https://doi.org/10.1088/0268-1242/20/12/013
https://doi.org/10.1088/0268-1242/20/12/013
Publikováno v:
Optoelectronics Instrumentation & Data Processing; Oct2023, Vol. 59 Issue 5, p612-619, 8p
Macroporous silicon formation by electrochemical anodization of n-type silicon without illumination.
Publikováno v:
Journal of Applied Physics; 2018, Vol. 124 Issue 9, pN.PAG-N.PAG, 8p, 1 Color Photograph, 1 Diagram, 5 Graphs
Publikováno v:
Journal of Communications Technology & Electronics; Mar2018, Vol. 63 Issue 3, p303-305, 3p