Zobrazeno 1 - 1
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pro vyhledávání: '"Görsch, Stephan"'
Publikováno v:
EPJ Web of Conferences, Vol 215, p 03004 (2019)
A new approach for the realization of depth reference samples is presented. By a combination of photolithography, reactive ion beam etching, surface planarization with photoresists and a subsequent coating with non-transparent materials, defined sinu
Externí odkaz:
https://doaj.org/article/7db70331621f447dbf7b48479fb0c063
