Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Funakawa, Shingo"'
Publikováno v:
In Diamond & Related Materials 2005 14(3):719-723
Publikováno v:
In Diamond & Related Materials 2004 13(4):994-998
Publikováno v:
In Diamond & Related Materials 2003 12(3):464-468
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 5, p1948-1951, 4p
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2005, Vol. 23 Issue 3, p1084-1087, 4p
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2004, Vol. 22 Issue 4, p1958-1963, 6p
Autor:
Kimura, Chiharu, Yamamoto, Tomohide, Funakawa, Shingo, Hirakawa, Masaaki, Murakami, Hirohiko, Sugino, Takashi
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 5, p2212-2216, 5p