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pro vyhledávání: '"Fumitoshi Takamine"'
Autor:
Hiroyuki Miyazoe, Jai Hyuk Choi, Masaki Sai, Kazuo Terashima, Takaaki Tomai, Shinya Kiriu, Fumitoshi Takamine
Publikováno v:
Applied Physics Letters. 94:191502
A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c250667bec14915c24d9084a21fb9182
https://doi.org/10.1063/1.3130183
https://doi.org/10.1063/1.3130183
