Zobrazeno 1 - 10
of 19
pro vyhledávání: '"Fumihiko Oda"'
Publikováno v:
Journal of Photopolymer Science and Technology. 22:329-334
In recent years we have seen growing numbers of cases in which outgassing generated by resists during ArF exposure gives problems such as fogging of exposure equipment lenses. Scanner manufacturers have reportedly begun taking countermeasures, for ex
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e8628993617b744d42da1e1a329caa79
https://doi.org/10.2494/photopolymer.22.329
https://doi.org/10.2494/photopolymer.22.329
Publikováno v:
Journal of Photopolymer Science and Technology. 21:69-73
We previously performed in situ FT-IR measurements while subjecting chemically-amplified resists to UV light (248 nm) to observe photodecomposition of the PAG for KrF excimer lasers. Based on these observations, we measured rate constants for acid ge
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a4bc66601d7fb3e9a807ecff03b3ffde
https://doi.org/10.2494/photopolymer.21.69
https://doi.org/10.2494/photopolymer.21.69
Autor:
Fumihiko Oda, Hidenori Miura, K. Nomaru, Haruo Kuroda, Kawai Masayuki, M. Yokoyama, Hidehito Koike, Masaaki Sobajima
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 507:261-264
FEL lasing with the saturated power in the wavelength of 4-16 µm was achieved by using the KHI (Kawasaki Heavy Industries, ltd.) FEL device. The macro-pulse length of the electron beam was improved by using the LaB6 cathode instead of the dispenser
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::84803210d73127c97a773bbe279e3fe8
https://doi.org/10.1016/s0168-9002(03)00926-4
https://doi.org/10.1016/s0168-9002(03)00926-4
Autor:
Fumihiko Oda, V.M. Popik, Kawai Masayuki, K. Toyoda, M. Yokoyama, Hidehito Koike, Masaaki Sobajima, K. Nakai, Haruo Kuroda
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 507:242-245
Tokyo University of Science and Kawasaki Heavy Industries, Ltd. (KHI) have completed in 2001 the design and assembly of an FIR-FEL device using an S-band linac based at a spectral range between 300 and 1000 μm. The FEL device was installed into the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::54f9129bb735df0cf9c3e0203f631c0c
https://doi.org/10.1016/s0168-9002(03)00868-4
https://doi.org/10.1016/s0168-9002(03)00868-4
Autor:
Fumihiko Oda, Hidenori Miura, K. Nomaru, M. Yokoyama, Hiroto Kuroda, Masaaki Sobajima, Hidehito Koike, Kawai Masayuki
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 483:291-295
FEL lasing with the saturated power in the wavelength of 4–16mm was achieved by using the KHI (Kawasaki Heavy Industries, Ltd.) FEL device. The macro-pulse length of the electron beam was improved by using the LaB6 cathode instead of the dispenser
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d6d0489f17418db3b5c4ec4680ef01fe
https://doi.org/10.1016/s0168-9002(02)00330-3
https://doi.org/10.1016/s0168-9002(02)00330-3
Autor:
Fumihiko Oda, Yokoyama Minoru, Kawai Masayuki, Hidehito Koike, Hidenori Miura, Masaaki Sobajima
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 483:240-244
A far-infrared FEL will be newly installed in the IR FEL Research Center at the Science University of Tokyo (FEL-SUT) in 2002. In this study, optical cavity misalignment effects for the far-infrared FEL are researched by using the simulation code tha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::24e729ea6fafc77f1638d14f09e1475e
https://doi.org/10.1016/s0168-9002(02)00319-4
https://doi.org/10.1016/s0168-9002(02)00319-4
Autor:
Hidenori Miura, K. Nomaru, H Hattori, Hidehito Koike, Kawai Masayuki, Masaaki Sobajima, M. Yokoyama, Haruo Kuroda, Fumihiko Oda
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 475:38-42
The first lasing of the KHI FEL device installed at the FEL-SUT was obtained at 9 μm on July 6, 2000. The FEL device consists of a 40 MeV accelerator, a beam transport system with two 25° bending magnets, an undulator of 40 periods and 32 mm period
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7f77c0bcea8aae5c56aa2e5bd1b253c9
https://doi.org/10.1016/s0168-9002(01)01531-5
https://doi.org/10.1016/s0168-9002(01)01531-5
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 475:583-587
Kawasaki Heavy Industries, Ltd. (KHI) has developed a linac-based compact IR free electron laser device and has installed it in the FEL-SUT (IR FEL Research Center of Science University of Tokyo). The FEL device adopts a combination of a multi-cell R
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0cead74caf227be9b1ad1cbd6cf15b64
https://doi.org/10.1016/s0168-9002(01)01588-1
https://doi.org/10.1016/s0168-9002(01)01588-1
Autor:
Nakayama Akihiro, K. Nomaru, Kawai Masayuki, Hidehito Koike, Fumihiko Oda, M. Yokoyama, Haruo Kuroda
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 445:379-383
Kawasaki Heavy Industries Ltd. has installed an FEL beam transport system at the IR FEL Research Center of the Science University of Tokyo (FEL-SUT). This system transports the FEL output beam from the FEL machine room to the optical diagnostic room
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ee87d2dba6a3c43e9c124a8a510cd556
https://doi.org/10.1016/s0168-9002(00)00087-5
https://doi.org/10.1016/s0168-9002(00)00087-5
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 445:404-407
Kawasaki Heavy Industries Ltd. (KHI) has developed the compact IR FEL device, which adopts a combination of a newly designed RF gun with a thermionic cathode and an α-magnet as an injector. The accelerating mode of the S-band RF gun is a π/2 standi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6858a3000cd009c7adc325c84959fc19
https://doi.org/10.1016/s0168-9002(00)00092-9
https://doi.org/10.1016/s0168-9002(00)00092-9