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pro vyhledávání: '"Fumiharu Katsumata"'
Autor:
Fumiharu Katsumata, Yasumasa Yamaguchi, Masaaki Nishimura, Makoto Ishida, Yoshinori Matsumoto, Fumihiko Nishida
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 121:362-366
The three axis SOI capacitive accelerometer has been developed using silicon bulk micro- machining. The accelerometer has a glass-silicoll structure measuring 2.8mm by 2.8mm by 1.0mm. The accelerometer has a 500μm thick silicon mass formed by dicing
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::039dc006ecfb8c6f9987f640bb4ad7ff
https://doi.org/10.1541/ieejsmas.121.362
https://doi.org/10.1541/ieejsmas.121.362
