Zobrazeno 1 - 10
of 40
pro vyhledávání: '"Fumiaki Hyuga"'
Publikováno v:
Journal of Applied Physics. 84:5614-5620
Annealing effects on the electrical and optical characteristics of GaAs/InGaP/n+InGaAs:Si/GaAs epilayers grown on GaAs semi-insulating substrates by metal organic chemical vapor deposition have been investigated. This epilayer structure has been used
Publikováno v:
Microelectronics Reliability. 37:1659-1662
This paper discusses the reliability of three-dimensional Au WSiN interconnections buried in a polyimide layer. Temperature cycle tests and bias stress tests reveal that high stability of this system. It is found that the enhanced degradation occurs
Autor:
Fumiaki Hyuga, Takumi Nittono
Publikováno v:
Journal of Applied Physics. 81:2607-2610
InGaP/GaAs heterointerfaces grown by metalorganic chemical vapor deposition have been characterized by a high-resolution x-ray diffraction analysis of multiple quantum well structures. The flow of AsH3 to InGaP surface produces an InGaAs-like interfa
Autor:
Fumiaki Hyuga, Takumi Nittono
Publikováno v:
Journal of Crystal Growth. 170:762-766
The effect of treating the substrate prior to epitaxial growth has been studied for the purpose of reducing unintentional impurities at the interface between epitaxial layers and GaAs substrates. It was found that treatment in HF or HCl solutions red
Autor:
Yi-Ming Xiong, Kenichi Watanabe, Cheong Chee Wong, Kenichiro Kobayashi, Tadashi Saitoh, Fumiaki Hyuga
Publikováno v:
Thin Solid Films. 270:97-102
Spectroscopic ellipsometry (SE), a non-destructive optical method, was used for the characterization of In0.48Ga0.52P-based thin-layer structures. Two types of sample structures were investigated. One was an In0.48Ga0.52P-based single-layer structure
Publikováno v:
Journal of Applied Physics. 78:5939-5944
We investigate the effect of Si ion implantation and subsequent rapid thermal annealing (RTA) on the homogeneity of the crystal quality of metalorganic chemical‐vapor‐deposited GaAs (150 A)/InGaP (100 A)/n+InGaAs:Si (150–200 A)/GaAs (800 A) epi
Publikováno v:
Journal of Applied Physics. 78:5387-5390
Growth conditions of metalorganic chemical vapor deposition have been investigated for the purpose of obtaining abrupt InGaP/GaAs interfaces. Photoluminescence (PL) spectra of InGaP/GaAs quantum wells (QWs) are used to characterize these interfaces.
Publikováno v:
Journal of Applied Physics. 78:1793-1797
Results are presented on the use of metalorganic chemical‐vapor deposition (CVD)‐grown InGaP lattice matched to GaAs as part of a capping scheme to protect an n+GaAs epilayer during high‐temperature annealing. Such an epilayer structure is impo
Publikováno v:
Journal of The Electrochemical Society. 138:2815-2820
Publikováno v:
Applied Physics Letters. 73:372-374
Carrier concentration (N) in the channel layers of pseudomorphic In0.5Ga0.5P/In0.2Ga0.8As/GaAs heterostructure field-effect transistors (HFETs) is evaluated by Raman scattering measurements. The coupled mode between the InGaAs longitudinal optical ph