Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Fukuya Naohito"'
Autor:
Rao Tummala, Fuhan Liu, Mohanalingam Kathaperumal, Atsushi Kubo, Naoki Watanabe, Atom Watanabe, Cheng Ping Lin, Pratik Nimbalkar, David Weyers, Madhavan Swaminathan, Fukuya Naohito, Toshiyuki Makita
Publikováno v:
2020 IEEE 70th Electronic Components and Technology Conference (ECTC).
Low-stress and low-warpage dielectrics are gaining importance as we move towards large-body Multi-chip Modules (MCMs). This paper demonstrates fabrication of redistribution layer (RDL) with 5 μm linewidth/spacing using a novel low-stress dielectric