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pro vyhledávání: '"Fu-Chung Kuo"'
Autor:
Jia-Yush Yen, Fu-Cheng Wang, Fan-Chun Kuo, Wei-Lun Huang, Tein-Tung Chung, Shang-Chin Chou, Fu-Chung Kuo, Yen-Han Wang
Publikováno v:
Precision Engineering. 68:106-123
This note addresses the high-speed, high-precision point-to-point motion control of an air-bearing planar stage. The custom-designed stage uses four air-bearings to levitate the stage for the high-speed frictionless operation. Because of the floating
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e1def76445e416c4e6a34d07f2738126
https://doi.org/10.1016/j.precisioneng.2020.11.009
https://doi.org/10.1016/j.precisioneng.2020.11.009
