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A Transmission X-ray Microscope (TXM) for Non-destructive 3D Imaging of ICs at Sub-100 nm Resolution
Autor:
David Trapp, Suneeta Neogi, Christopher Kelly, Casey Bennet, Frederick William Duewer, Kenneth W. Nill, Souping Yan, Markus Kuhn, David Scott, Peter Coon, Steve Wang, Wenbing Yun, Shashidar Kamath, Alan Lyon
Publikováno v:
International Symposium for Testing and Failure Analysis.
Xradia has developed a laboratory table-top transmission x-ray microscope, TXM 54-80, that uses 5.4 keV x-ray radiation to nondestructively image buried submicron structures in integrated circuits with at better than 80 nm 2D resolution. With an inte
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::343206f184a2dda2f0ddd654810acd6a
https://doi.org/10.31399/asm.cp.istfa2002p0227
https://doi.org/10.31399/asm.cp.istfa2002p0227
