Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Frederic Fillot"'
Autor:
Camille Laguna, Mathieu Bernard, Frederic Fillot, Denis Rouchon, Nevine Rochat, Julien Garrione, Lucie Prazakova, Emmanuel Nolot, Valentina Meli, Niccolo Castellani, Simon Martin, Chiara Sabbione, Guillaume Bourgeois, Marie-Claire Cyrille, Liviu Militaru, Abdelkader Souifi, Francois Andrieu, Gabriele Navarro
Publikováno v:
IEEE Transactions on Electron Devices
Growth Kinetics and Boron-Doping of Very High Ge Content Si1-xGex for Sources and Drains Engineering
Publikováno v:
ECS Transactions. 6:397-400
We have studied the in-situ boron-doping of high Ge content Si1- xGex layers (x = 0.3, 0.4 and 0.5). Those layers have been grown at low pressure (20 Torr) and low temperature (600{degree sign}C to 650{degree sign}C) with a heavily chlorinated chemis
Autor:
Jean-Francois Damlencourt, Yves Campidelli, Marie-Christine Roure, Benjamin Vincent, Eugenie Martinez, Frederic Fillot, Brice Arrazat, Tuan NGuyen, S. Cristoloveanu, Clavelier Laurent
Publikováno v:
ECS Meeting Abstracts. :746-746
not Available.
Autor:
Fillot, Frederic, Sabbione, Chiara
Publikováno v:
Journal of Applied Physics; 12/21/2020, Vol. 128 Issue 23, p1-11, 11p