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Autor:
Appo van der Wiel, Tessa ten Cate, Bart van de Vorst, Jan-Willem Burssens, Anton Aulbers, Freddie Furrer, Ben van der Zon, Jian Chen, Hessel Maalderink, Mark Vaes
Publikováno v:
2012 4th Electronic System-Integration Technology Conference.
Packaging of semiconductor chips, especially MEMS-based, always causes stress on the functional areas of the die causing unpredictable changes in chip performance. As a consequence such devices can only be calibrated individually after complete assem