Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Fred Niell"'
Publikováno v:
IEEE Transactions on Plasma Science. 44:182-186
Diversified Technologies Inc. (DTI) completed a four-year Small Business Innovation Research effort to research kicker drivers for Next Generation Light Source (NGLS) injectors. The NGLS specification required a 10-kV pulse into a 50- $\Omega $ resis
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::258ad524398ae903dc9d3a4dff3b9631
https://doi.org/10.1109/tps.2015.2489018
https://doi.org/10.1109/tps.2015.2489018
Publikováno v:
2013 IEEE 14th International Vacuum Electronics Conference (IVEC).
Diversified Technologies, Inc. (DTI), under an SBIR grant from the U.S. Department of Energy, assembled a prototype pulse generator capable of meeting the original specifications for the Next Generation Light Source (NGLS) fast deflector. The ultimat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::89cd5e529b69806b15361c2c59255446
https://doi.org/10.1109/ivec.2013.6571188
https://doi.org/10.1109/ivec.2013.6571188
Autor:
Donald K. Smith, Fred Niell, Deborah Gustafson, Paul A. Blackborow, Matthew M. Besen, Stephen F. Horne, Matthew J. Partlow
Publikováno v:
Alternative Lithographic Technologies.
The Energetiq EQ-10 is a medium-power (10 W/2π, 13.5nm +/- 1%, Xenon) EUV source suitable for a variety of mirror testing, resist exposure, and defect inspection applications. The EQ-10 was designed to operate at a pulse frequency of 1 to 2 kHz 1 .
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e1f660358a22742cf6df00a32755d3f1
https://doi.org/10.1117/12.813765
https://doi.org/10.1117/12.813765