Zobrazeno 1 - 10
of 24
pro vyhledávání: '"Fred Lakhani"'
Autor:
Kenneth W. Tobin, Thomas P. Karnowski, Lloyd F. Arrowood, Regina K. Ferrell, Fred Lakhani, James S. Goddard
Publikováno v:
EURASIP Journal on Advances in Signal Processing, Vol 2002, Iss 7, Pp 704-713 (2002)
Image data management in the semiconductor manufacturing environment is becoming more problematic as the size of silicon wafers continues to increase, while the dimension of critical features continues to shrink. Fabricators rely on a growing host of
Externí odkaz:
https://doaj.org/article/2775202573b14e2fb585e7a44816281b
Autor:
Fred Lakhani, Regina K. Ferrell, Thomas P. Karnowski, Lloyd F. Arrowood, Kenneth W. Tobin, James S. Goddard
Publikováno v:
EURASIP Journal on Advances in Signal Processing, Vol 2002, Iss 7, Pp 704-713 (2002)
Image data management in the semiconductor manufacturing environment is becoming more problematic as the size of silicon wafers continues to increase, while the dimension of critical features continues to shrink. Fabricators rely on a growing host of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::087611af4340f1abeff0a0be2f3ca40d
https://doaj.org/article/2775202573b14e2fb585e7a44816281b
https://doaj.org/article/2775202573b14e2fb585e7a44816281b
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 17:1369-1376
To be productive and profitable in a modern semiconductor fabrication environment, large amounts of manufacturing data must be collected, analyzed, and maintained. This includes data collected from in- and off-line wafer inspection systems and from t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e471930f0bed885382198ee7a98c7d8a
https://doi.org/10.1116/1.581822
https://doi.org/10.1116/1.581822
Publikováno v:
2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE Cat. No.01CH37160).
The rapid identification of yield detracting mechanisms through integrated yield management is the primary goal of defect sourcing and yield learning. At future technology nodes, yield learning must proceed at an accelerated rate to maintain current
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc11a6e50ab9b5839727bd6234778183
https://doi.org/10.1109/asmc.2001.925642
https://doi.org/10.1109/asmc.2001.925642
Publikováno v:
SPIE Proceedings.
Images of semiconductor defects are maintained in semiconductor yield-management systems to help diagnose problems that arise during the manufacturing process. A common problem in future systems is the number of images to maintain, which is increasin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::071bcc13acacbc9ad7786f064cfff473
https://doi.org/10.1117/12.475648
https://doi.org/10.1117/12.475648
Publikováno v:
SPIE Proceedings.
To be productive and profitable in a modern semiconductor fabrication environment, large amounts of manufacturing data must be collected, analyzed, and maintained. This data is increasingly being used to design new processes, control and maintain too
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::84c7400d367b0742566e75ed97bc628f
https://doi.org/10.1117/12.475640
https://doi.org/10.1117/12.475640
Autor:
Fred Lakhani
Publikováno v:
SPIE Proceedings.
Realizing optimum integrated circuit yield has always been a formidable challenge for the semiconductor device manufacturer. With continuing reduction in minimum feature size, ongoing introduction of new materials and device architectures and inclusi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::640c1f07c10b52cea822a2f528111e05
https://doi.org/10.1117/12.429360
https://doi.org/10.1117/12.429360
Publikováno v:
SPIE Proceedings.
As integrated circuit fabrication processes continue to increase in complexity, it has been determined that data collection, retention, and retrieval rates will continue to increase at an alarming rate. At future technology nodes, the time required t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::479ff40539c4e7132e37d579e5cb4446
https://doi.org/10.1117/12.429361
https://doi.org/10.1117/12.429361
Autor:
Thomas P. Karnowski, Fred Lakhani, James S. Goddard, Kenneth W. Tobin, Lloyd F. Arrowood, Regina K. Ferrell
Publikováno v:
SPIE Proceedings.
Images of semiconductor defects are maintained in semiconductor yield management systems to diagnose problems that arise during the manufacturing process. A semiconductor-specific content-based image retrieval system was developed by Oak Ridge Nation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fc375677b9acbba7a3ccfa2daeae8037
https://doi.org/10.1117/12.429362
https://doi.org/10.1117/12.429362
Publikováno v:
SPIE Proceedings.
As integrated circuit fabrication processes continue to increase in complexity, it has been observed that data collection, retention, and retrieval rates are continuing to increase at an alarming rate. At future technology nodes, the time required to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1dd49059927f9e17bfba2b9ab50ba2fc
https://doi.org/10.1117/12.386478
https://doi.org/10.1117/12.386478