Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Fred C. Redeker"'
Autor:
Ashwin Chockalingam, Jason G. Fung, Rajeev Bajaj, Gana Ganapathi, Fred C. Redeker, Zhibo Yuan, Puneet Jawali, Raghava Kakireddy, Daniel Redfield, Aniruddh Khanna, Boyi Fu, Patibandla Nag B, Chris Orilall, Mario Cornejo, Mayu Yamamura
Publikováno v:
ECS Journal of Solid State Science and Technology. 8:P3063-P3068
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9264d03f5b5a235ad2d23c9c1c2322ee
https://doi.org/10.1149/2.0121905jss
https://doi.org/10.1149/2.0121905jss
Publikováno v:
The Journal of the Acoustical Society of America. 124:703
A carrier head for chemical mechanical polishing, includes a base, a support structure attached to the base having a surface for contacting a substrate, and a retaining structure attached to the base to prevent the substrate from moving along the sur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c7779f17cd39a9ef917dc8eecd13be9
https://doi.org/10.1121/1.2969612
https://doi.org/10.1121/1.2969612